FASTECH
Slim High-Precision XYθ Alignment Stage
YRA-070-KO
  • Table Size(mm)
  • • 70 × 70
1. Main Features
  • • High precision XYθ Stage for high accuracy of positioning Optical Encoder of Ezi-SERVO
  • • Provide DLL Library for PC(Window) interface
  • • Ultra-slim stage with integrated 3-axis structure
  • • High precision Ball Screw mechanism accomplished Long life
  • • Equipped with center hole opening while full stroke moving
  • • Position Accuracy Improvement than convertional 5 phase stepping motor by combination with High Accuracy Optical Encoder of Ezi-SERVO​
2. Specification
Model Number Ezi-Robo-PMS-☐ ☐-28M-D-YRA-071-KO
XY Specification θ Specification
Table Size 70 × 70mm
Travel Range ±5mm ±5°
Lead Mechanism Ball Screw, Lead 1.0mm
Height 60mm
Guide Cross Roller Guide, Cross Roller Bearing
Resolution *1 1mm 0.0012732°/step
Max. Speed 5mm/sec 6.36°/sec
Repeatability(XY) Less ±0.5㎛ -
Angular Repeatability(θ) - Less 0.001°
Lost Motion Less 2㎛ Less 0.005°
Straightness Less 1㎛ / 10[mm] -
Backlash Less 1㎛ Less 0.005°
Motor EzM-28M(FASTECH)
  • * 1 : Specification based on Ezi-SERVO 28M Motor resolution as 1,000[Step/rev].
3. Application
  • • Camera and laser alignment
  • • Alignment measurement and bonding of small substrates such as LCD or OLED
  • • Mark alignment on screen printers
  • • Alignment and evaluation of optical equipment, medical equipment, and biotechnology equipment​
Ezi-Robo-PMS-☐ ☐-28M-D-YRA-071-KO