Slim High-Precision Swivel Stage
SA07A-R2T, SA07A-R2M
- Table Size(mm)
- • 70 × 70
1. Main Features
- • Slim High-Precision Swivel Stage
- • Provide DLL Library for PC(Window) interface
- • High precision Ball Screw mechanism accomplished Long life
- • Position Accuracy Improvement than convertional 5 phase stepping motor by combination with High Accuracy Optical Encoder of Ezi-SERVO
2. Specification
| Model Number | Ezi-Robo-PMS-☐ ☐-28M-D-SA07A-R2S | |
|---|---|---|
| Swivel Specification | ||
| Table Size | 70 × 70mm | |
| Angular Range | ±5° | ±4.5° |
| Lead Mechanism | Ball Screw, Lead 1.0mm | |
| Height | 26mm | |
| Guide | Cross Roller Guide | |
| Resolution *1 | 0.000756° | 0.000564° |
| Max. Speed | 11.3°/sec | 8.5°/sec |
| Angular Repeatability(θ) | Less 0.003° | |
| Lost Motion | Less 0.003° | |
| Backlash | Less 0.003° | |
| Motor | EzM-28M(FASTECH) | |
- * 1 : Specification based on Ezi-SERVO 28M Motor resolution as 1,000[Step/rev].
3. Application
- • Camera and laser alignment
- • Optical pick-up adjustment, fine angle positioning in the inspection system
- • Angle alignment of work
Ezi-Robo-PMS-☐ ☐-28M-D-SA07A-R2T, SA07A-R2M
