Slim High-Precision Rotation Stage
RA07A-T01
- Table Size(mm)
- • 70 × 70
1. Main Features
- • High precision ultra-slim θ Stage for high accuracy of positioning Optical Encoder of Ezi-SERVO
- • Provide DLL Library for PC(Window) interface
- • High precision Ball Screw mechanism accomplished Long life
- • Position Accuracy Improvement than convertional 5 phase stepping motor by combination with High Accuracy Optical Encoder of Ezi-SERVO
2. Specification
| Model Number | Ezi-Robo-PMS-☐ ☐-28M-D-RA07A-T01 | |
|---|---|---|
| θ Specification | ||
| Table Size | 70 × 70mm | |
| Angular Range | ±5mm | |
| Lead Mechanism | Tangent-Bar System, Ball Screw | |
| Height | 30mm | |
| Guide | Cross Roller Guide | |
| Resolution *1 | 0.001364° | |
| Max. Speed | 13.64°/sec | |
| Angular Repeatability(θ) | Less 0.002° | |
| Lost Motion | Less 0.005° | |
| Backlash | Less 0.005° | |
| Eccentricity | Less 5㎛ / ±5° | |
| Motor | EzM-28M(FASTECH) | |
- * 1 : Specification based on Ezi-SERVO 28M Motor resolution as 1,000[Step/rev].
3. Application
- • Rotation of Work
- • θ direction alignment in combination with XY stage
- • Part Scanning, Laser Position Compensation
- • θ direction alignment in combination with XY stage
Ezi-Robo-PMS-☐ ☐-28M-D-RA07A-T01
