박형 초정밀 XYθ Alignment 스테이지
YRA-130-KO
Model Number | Ezi-Robo-PMS-☐ ☐-28M-D-YRA-130-KO | |
---|---|---|
XY 사양 | θ 사양 | |
Table Size | 130 × 130mm | |
Travel Range | ±5mm | ±5° |
Lead Mechanism | Ball Screw, Lead 1.0mm | |
Height | 60mm | |
Guide | Cross Roller Guide, Cross Roller Bearing | |
Resolution *1 | 0.001mm/step | 0.000674°/step |
Max. Speed | 5mm/sec | 3.37°/sec |
Repeatability(XY) | ±0.5㎛ 이내 | - |
Angular Repeatability(θ) | - | 0.001° 이내 |
Lost Motion | 2㎛ 이내 | 0.005° 이내 |
Straightness | 1㎛ 이내 / 10mm | - |
Backlash | 1㎛ 이내 | 0.005° 이내 |
Motor | EzM-28M(파스텍) |