박형 초정밀 Vertical 스테이지
ZA07A-W2C01
Model Number | Ezi-Robo-PMS-☐ ☐-42M-☐-ZA07A-W2C01 | |
---|---|---|
Vertical 사양 | ||
Table Size | 70 × 70mm | |
Travel Range | ±2.5mm | |
Lead Mechanism | 1/4 Wedge, Ball Screw, Lead 1.0mm | |
Height | 40mm | |
Guide | Cross Roller Guide | |
Resolution *1 | 0.25㎛ | |
Max. Speed | 1.25mm/sec | |
Repeatability(XY) | ±0.5㎛ 이내 | |
Lost Motion | 0.3㎛ 이내 | |
Straightness(Vertical) | 5㎛ 이내 / 5mm | |
Backlash | 1㎛ 이내 | |
Motor | EzM-28M(파스텍) |