박형 초정밀 XY 스테이지
YA07A-R201
Model Number | Ezi-Robo-PMS-☐ ☐-28M-D-YA07A-R201 | |
---|---|---|
Y 사양 | ||
Table Size | 70 × 70mm | |
Travel Range | ±10mm | |
Lead Mechanism | Ball Screw, Lead 1.0mm | |
Height | 42mm | |
Guide | Cross Roller Guide | |
Resolution *1 | 1㎛ | |
Max. Speed | 5mm/sec | |
Repeatability(XY) | ±0.2㎛ 이내 | |
Lost Motion | 0.5㎛ 이내 | |
Straightness | Vertical | 0.5㎛ 이내 / 20mm |
Horizontal | 1㎛ 이내 / 20mm | |
Backlash | 0.2㎛ 이내 | |
Motor | EzM-28M(파스텍) |