박형 초정밀 Swivel 스테이지
SA05A-R2S
Model Number | Ezi-Robo-PMS-☐ ☐-28M-D-SA05A-R2S | |
---|---|---|
R2T | R2M | |
Swivel 사양 | ||
Table Size | 50 × 50mm | |
Angular Range | ±5° | ±4.5° |
Lead Mechanism | Ball Screw, Lead 1.0mm | |
Height | 40mm | |
Guide | Cross Roller Guide | |
Resolution *1 | 0.001063° | 0.000797° |
Max. Speed | 16°/sec | 12°/sec |
Angular Repeatability(θ) | 0.003° 이내 | |
Lost Motion | 0.003° 이내 | |
Backlash | 0.003° 이내 | |
Motor | EzM-28M(파스텍) |