박형 초정밀 Rotation 스테이지
RA07A-T01
Model Number | Ezi-Robo-PMS-☐ ☐-28M-D-RA07A-T01 | |
---|---|---|
θ 사양 | ||
Table Size | 70 × 70mm | |
Angular Range | ±5mm | |
Lead Mechanism | Tangent-Bar System, Ball Screw | |
Height | 30mm | |
Guide | Cross Roller Guide | |
Resolution *1 | 0.001364° | |
Max. Speed | 13.64°/sec | |
Angular Repeatability(θ) | 0.002° 이내 | |
Lost Motion | 0.005° 이내 | |
Backlash | 0.005° 이내 | |
Eccentricity | 5㎛ 이내 / ±5° | |
Motor | EzM-28M(파스텍) |