Slim High-Precision XYθ Alignment Stage
YRA-130-KO
Model Number | Ezi-Robo-PMS-☐ ☐-28M-D-YRA-130-KO | |
---|---|---|
XY Specification | θ Specification | |
Table Size | 130 × 130mm | |
Travel Range | ±5mm | ±5° |
Lead Mechanism | Ball Screw, Lead 1.0mm | |
Height | 60mm | |
Guide | Cross Roller Guide, Cross Roller Bearing | |
Resolution *1 | 0.001mm/step | 0.000674°/step |
Max. Speed | 5mm/sec | 3.37°/sec |
Repeatability(XY) | Less ±0.5㎛ | - |
Angular Repeatability(θ) | - | Less 0.001° |
Lost Motion | Less 2㎛ | Less 0.005° |
Straightness | Less 1㎛ / 10mm | - |
Backlash | Less 1㎛ | Less 0.005° |
Motor | EzM-28M(FASTECH) |