Slim High-Precision Vertical Stage
ZA07A-W2C01
Model Number | Ezi-Robo-PMS-☐ ☐-42M-☐-ZA07A-W2C01 | |
---|---|---|
Vertical Specification | ||
Table Size | 70 × 70mm | |
Travel Range | ±2.5mm | |
Lead Mechanism | 1/4 Wedge, Ball Screw, Lead 1.0mm | |
Height | 40mm | |
Guide | Cross Roller Guide | |
Resolution *1 | 0.25㎛ | |
Max. Speed | 1.25mm/sec | |
Repeatability(XY) | Less ±0.5㎛ | |
Lost Motion | Less 0.3㎛ | |
Straightness(Vertical) | Less 5㎛ / 5mm | |
Backlash | Less 1㎛ | |
Motor | EzM-28M(FASTECH) |