Slim High-Precision XY Stage
YA07A-R201
Model Number | Ezi-Robo-PMS-☐ ☐-28M-D-YA07A-R201 | |
---|---|---|
Y Specification | ||
Table Size | 70 × 70mm | |
Travel Range | ±10mm | |
Lead Mechanism | Ball Screw, Lead 1.0mm | |
Height | 42mm | |
Guide | Cross Roller Guide | |
Resolution *1 | 1㎛ | |
Max. Speed | 5mm/sec | |
Repeatability(XY) | Less ±0.2㎛ | |
Lost Motion | Less 0.5㎛ | |
Straightness | Vertical | Less 0.5㎛ / 20mm |
Horizontal | Less 1㎛ / 20mm | |
Backlash | Less 0.2㎛ | |
Motor | EzM-28M(FASTECH) |