Slim High-Precision XY Stage
YA07A-R201
- Table Size(mm)
- • 70 × 70
1. Main features
- • High precision ultra-slim XY Stage for high accuracy of positioning Optical Encoder of Ezi-SERVO
- • Provide DLL Library for PC(Window) interface
- • High precision Ball Screw mechanism accomplished Long life
- • Position Accuracy Improvement than convertional 5 phase stepping motor by combination with High Accuracy Optical Encoder of Ezi-SERVO
2. Specification
| Model Number | Ezi-Robo-PMS-☐ ☐-28M-D-YA07A-R201 | |
|---|---|---|
| Y Specification | ||
| Table Size | 70 × 70mm | |
| Travel Range | ±10mm | |
| Lead Mechanism | Ball Screw, Lead 1.0mm | |
| Height | 42mm | |
| Guide | Cross Roller Guide | |
| Resolution *1 | 1㎛ | |
| Max. Speed | 5mm/sec | |
| Repeatability(XY) | Less ±0.2㎛ | |
| Lost Motion | Less 0.5㎛ | |
| Straightness | Vertical | Less 0.5㎛ / 20mm |
| Horizontal | Less 1㎛ / 20mm | |
| Backlash | Less 0.2㎛ | |
| Motor | EzM-28M(FASTECH) | |
- * 1 : Specification based on Ezi-SERVO 28M Motor resolution as 1,000[Step/rev].
3. Application
- • Alignment and inspection of camera module
- • Alignment measurement and bonding of small substrates such as LCD or OLED
- • Mark alignment on screen printers
- • Alignment and evaluation of optical equipment, medical equipment, and biotechnology equipment
Ezi-Robo-PMS-☐ ☐-28M-D-YA07A-R201
