Slim High-Precision XY Stage
YA05A-R201
Model Number | Ezi-Robo-PMS-☐ ☐-28M-D-YA05A-R201 | |
---|---|---|
Y Specification | ||
Table Size | 50 × 50mm | |
Motion Range | ±7.5mm | |
Lead Mechanism | Ball Screw, Lead 1.0mm | |
Height | 40mm | |
Guide | Cross Roller Guide | |
Resolution *1 | 1㎛ | |
Max. Speed | 5mm/sec | |
Repeatability(XY) | Less ±0.2㎛ | |
Lost Motion | Less ±0.5㎛ | |
Straightness | Less 1㎛ / 15mm | |
Backlash | Less 0.2㎛ | |
Motor | EzM-28M(FASTECH) |