Slim High-Precision X Stage
XA05A-R201
Model Number | Ezi-Robo-PMS-☐ ☐-28M-D-XA05A-R201 |
---|---|
X Specification | |
Table Size | 50 × 50mm |
MotionRange | ±7.5mm |
Lead Mechanism | Ball Screw, Lead 1.0mm |
Height | 20mm |
Guide | Cross Roller Guide |
Resolution *1 | 1㎛ |
Max. Speed | 5mm/sec |
Repeatability(X) | Less ±0.2㎛ |
Lost Motion | Less ±0.5㎛ |
Straightness | Less 1㎛ / 15mm |
Backlash | Less 0.2㎛ |
Motor | EzM-28M(FASTECH) |