FASTECH
Slim High-Precision X Stage
XA05A-R201
  • Table Size(mm)
  • • 50 × 50
1. Main features
  • • High precision ultra-slim X Stage for high accuracy of positioning
  • • Provide DLL Library for PC(Window) interface
  • • High precision Ball Screw mechanism accomplished Long life
  • • Position Accuracy Improvement than convertional 5 phase stepping motor by combination with High Accuracy Optical Encoder of Ezi-SERVO​
2. Specification
Model Number Ezi-Robo-PMS-☐ ☐-28M-D-XA05A-R201
X Specification
Table Size 50 × 50mm
MotionRange ±7.5mm
Lead Mechanism Ball Screw, Lead 1.0mm
Height 20mm
Guide Cross Roller Guide
Resolution *1 1㎛
Max. Speed 5mm/sec
Repeatability(X) Less ±0.2㎛
Lost Motion Less ±0.5㎛
Straightness Less 1㎛ / 15mm
Backlash Less 0.2㎛
Motor EzM-28M(FASTECH)
  • * 1 : Specification based on Ezi-SERVO 28M Motor resolution as 1,000[Step/rev].
3. Application
  • • Alignment, measurement and bonding of small substrates such as LCD or OLED
  • • Mark alignment on screen printers
  • • Probe Inspection Equipment
  • • Round glass cutting process
  • • Alignment and evaluation of optical equipment, medical equipment, and biotechnology equipment​
Ezi-Robo-PMS-☐ ☐-28M-D-XA05A-R201