FASTECH
Slim High-Precision Rotation Stage
RA07A-T01
  • Table Size(mm)
  • • 70 × 70
1. Main Features
  • • High precision ultra-slim θ Stage for high accuracy of positioning Optical Encoder of Ezi-SERVO
  • • Provide DLL Library for PC(Window) interface
  • • High precision Ball Screw mechanism accomplished Long life
  • • Position Accuracy Improvement than convertional 5 phase stepping motor by combination with High Accuracy Optical Encoder of Ezi-SERVO​
2. Specification
Model Number Ezi-Robo-PMS-☐ ☐-28M-D-RA07A-T01
θ Specification
Table Size 70 × 70mm
Angular Range ±5mm
Lead Mechanism Tangent-Bar System, Ball Screw
Height 30mm
Guide Cross Roller Guide
Resolution *1 0.001364°
Max. Speed 13.64°/sec
Angular Repeatability(θ) Less 0.002°
Lost Motion Less 0.005°
Backlash Less 0.005°
Eccentricity Less 5㎛ / ±5°
Motor EzM-28M(FASTECH)
  • * 1 : Specification based on Ezi-SERVO 28M Motor resolution as 1,000[Step/rev].
3. Application
  • • Rotation of Work
  • • θ direction alignment in combination with XY stage
  • • Part Scanning, Laser Position Compensation
  • • θ direction alignment in combination with XY stage​
Ezi-Robo-PMS-☐ ☐-28M-D-RA07A-T01