Slim High-Precision Vertical Stage
ZA07A-X102
Model Number | Ezi-Robo-PMS-☐ ☐-42M-☐-ZA07A-X102 | |
---|---|---|
Vertical Specification | ||
Table Size | 70 × 70mm | |
Travel Range | ±10mm | |
Lead Mechanism | Ground Screw, Lead 0.5mm | |
Height | 50mm | |
Guide | Cross Roller Guide | |
Resolution *1 | 0.5㎛ | |
Max. Speed | 2.5mm/sec | |
Repeatability(XY) | Less ±0.5㎛ | |
Lost Motion | Less 1.5㎛ | |
Straightness(Vertical) | Less 7㎛ / 20mm | |
Motor | EzM-28M(FASTECH) |