· Miniature Stage Control
· 20 [mm] Motor + Encoder & Compact
Mini Drive
· High Speed Short Pitch Motion
· 20, 28 [mm] Motor + Encoder &
Compact Mini Drive
· Ezi-SERVO + Nidec Shimpo Planetary
Gearbox
· Force Control
· WTR(Wafer Transfer Robot) Operation
· Force Control
· Closed Loop Stepping System Using
External Linear Scale Encoder
· Belt & Pulley High Speed Short Pitch
Motion